Niobium Sputtering Target , 99.95%-99.99% Purity, Customized -Coating Material
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Application:
Coating materials for semiconductors and optics, anticorrosion
materials for ships, chemical vessels. LCD etc.
Purity:Nb 99.95%(3N5)-99.99%(4N)
Manufacturing Standard: ASTM B392, ASTM B393
Grain Size: Typical size<100μm Grain Size
(Other grain size available upon request )
Flatness: ≤0.2mm
Surface Roughness:< Ra 1.6μm
Surface： Polished
Dimension: Rectangular target, size as per request
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Specification: Customized as per request
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Products
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Regular Specification
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Limit Specification
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Niobiuim Rectangular Targets
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1193*127*6.0mm 685.8*127*6.35mm 320*100*8mm 377.8*120.6*6.35mm 475*127*6.0mm Φ355.6*6mm Φ152.4*6.0mm Φ101*6.0mm
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The maximum length of one Rectangular target is 1550mm, the maximum width is 530mm, grain size can be controlled between 30 to 80μm.
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Impurities:
Metallic impurities, ppm max by weight
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Element
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Cu
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Ti
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Mn
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Hf
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Fe
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Al
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Mo
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Cr
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Si
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Ta
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Ni
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W
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Zr
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Content
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10
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5
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5
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20
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20
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5
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10
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5
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30
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200
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5
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15
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50
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Non-Metallic impurities, ppm max by weight
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Element
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N
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O
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C
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H
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Content
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50
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100
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50
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10
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If you require customization service, you only need to send us your required material, purity, dimension, quantity or a drawing for an inquiry. We will reply you our best quote ASAP.
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