Niobium Sputtering Target - Rotary

[ Posttime:2018-07-14 | Hits:602 ]

Niobium Sputtering Target , Rotary Targets , 99.95(3N5)-99.99%(4N) Purity - Coating Material


Application:

Coating materials for semiconductors and optics, anticorrosion materials for ships, chemical vessels. LCD etc.

Specifications:

  1. Typical Analysis: 99.99%(4N)
  2. Metallic impurities, ppm max by weight
  3. Balance: Niobium
Element Mn Al Cu Si Hf Cr Mo Ni Fe Ta Ti W Zr
Content 5 5 10 30 20 5 10 5 20 200 5 15 50


Non-Metallic impurities, ppm max by weight

Element C H O N
Content 50 10 100 50


Grain Size:

  1. Typical size:30-80μm
  2. Other grain size available upon request

Recrystallization: 95%min

Surface Roughness<1.6μm

Density: highest possible, higher density increases the sputtering rate and enhances the electrical and optical properties of the film


Description:

Niobium sputtering target is the main raw material of niobium and its alloy film, which are widely used in color TFT, LCD, panel PC, optical lenses, glass coatings, electronic image, advanced touch screen, flat panel display and surface coating for energy-saving glasses, information storage, solar cell, chemical corrosive environment and shipping enterprise.


We smelt the high purity Nb2O5 we sourcing from the Chinese biggest hydrometallurgy plant by means of aluminothermic reduction to produce niobium aluminum alloy. Then the niobium aluminum alloy will be smelted in high Vacuum EB furnace to produce niobium bars with Nb content 99.9% up, which will be smelted again in high Vacuum EB furnace to be purified and produce Niobium ingots with purtiy 99.95% up. We manufacture various specifications of niobium sputtering targets upon the request of customers through vacuum EB furnace smelting method. By way of unique rolling process, through complicated treatment and accurate annealing temperature and time, we produce different dimensions of the tantalum sputtering targets such as disc targets, rectangular targets and rotary targets. Moreover, we guarantee the niobium purity is between Nb 99.95% to 99.99% or higher; the grain size is below 30-80um, flatness is below 0.2mm and the Surface Roughness is below Ra.0.4μm. The size can be tailored by the customers’ requirements. We control our products quality through the raw material source till the whole production line and finally deliver to our customers in order to make sure you purchase our products with stable and same quality for each lot.


Furthermore, we are glad to provide you the trade in service. We can recover your used sputtering targets to help you with supplying a same new one with lowest price. You are warmly welcome to tell your ideas or requirements to us in a win-win prospect. For more inquiry and information, please don’t hesitate to contact us at any time. We also expect your visit to our factory to witness our whole infrastructure, technology, products and our team.