Niobium Sputtering Target - Rectangular
Standard:
ASTM B393
Brand:
Nb 99.95%(3N5) - 99.99%(4N)
Size:
Rectangular Target

Introduction

Niobium Sputtering Target , Rectangular Target , Planar Targets

Purity:Nb 99.95%(3N5)-99.99%(4N)

Dimension: Rectangular target, size as per request

Manufacturing Standard: ASTM B392, ASTM B393

Specification: Customized as per request

Products Regular Specification Limit Specification
Niobiuim Rectangular Targets 1193*127*6.0mm 685.8*127*6.35mm 320*100*8mm 377.8*120.6*6.35mm 475*127*6.0mm Φ355.6*6mm Φ152.4*6.0mm Φ101*6.0mm The maximum length of one Rectangular target is 1550mm, the maximum width is 530mm, grain size can be controlled between 30 to 80μm.


Application:

Coating materials for semiconductors and optics, anticorrosion materials for ships, chemical vessels. LCD etc.

Impurities:

Metallic impurities, ppm max by weight

Element Cu Ti Mn Hf Fe Al Mo Cr Si Ta Ni W Zr
Content 10 5 5 20 20 5 10 5 30 200 5 15 50


Non-Metallic impurities, ppm max by weight

Element N O C H
Content 50 100 50 10

Grain Size : 40-80μm,(customized by customers’ requirements)Other grain size available upon request

Recrystallization: 95%min

Flatness ≤0.2mm

Surface Roughness<1.6μm

Description:

Niobium is a soft, grey, crystalline, ductile transition metal which is used in various superconducting materials. Its melting point is 2468℃ and boiling point 4742℃. It has the characteristics of high temperature resistance, high corrosion resistance and good ductility. Therefore, niobium and its alloy are widely used in electronics, iron and steel industry, chemical, jewelry, superconducting, engineering, aviation, aerospace industry etc.Niobium sputtering target is the main raw material of niobium and its alloy film, which are widely used in color TFT, LCD, panel PC, optical lenses, glass coatings, electronic image, advanced touch screen, flat panel display and surface coating for energy-saving glasses, information storage, solar cell, chemical corrosive environment and shipping enterprise.