Application:
Coating materials for semiconductors and optics
Purity：99.95%(3N5) - 99.99%(4N)
Dimension：disc target, rectangular target and rotary target
Manufacturing Standard: ASTM B 708
Specifications:
Typical Analysis： 99.95(3N5) - 99.99%(4N)
Metallic impurities, ppm max by weight
Balance: Tantalum
|
Element
|
Al
|
Ag
|
Au
|
B
|
Bi
|
Ca
|
Cd
|
Cl
|
Co
|
Cr
|
Cu
|
Fe
|
|
Content
|
0.2
|
1.0
|
1.0
|
0.1
|
1.0
|
0.1
|
1.0
|
1.0
|
0.05
|
0.25
|
0.75
|
0.4
|
|
Element
|
Ga
|
Ge
|
Hf
|
K
|
Li
|
Mg
|
Mn
|
Mo
|
Na
|
Nb
|
Ni
|
P
|
|
Content
|
1.0
|
1.0
|
1.0
|
0.05
|
0.1
|
0.1
|
0.1
|
5.0
|
0.1
|
75
|
0.25
|
1.0
|
|
Element
|
Pb
|
S
|
Si
|
Sn
|
Th
|
Ti
|
V
|
W
|
Zn
|
Zr
|
Y
|
U
|
|
Content
|
1.0
|
0.2
|
0.2
|
0.1
|
0.0
|
1.0
|
0.2
|
70.0
|
1.0
|
0.2
|
1.0
|
0.005
|
Non-Metallic impurities, ppm max by weight
|
Element
|
C
|
H
|
O
|
N
|
|
Content
|
100
|
15
|
150
|
100
|
|
|
Grain Size:
Typical size<100μm Grain Size
Other grain size available upon request
Flatness ≤0.2mm
Surface Roughness<1.6μm
|
|
Products
|
RegularSpecification
|
LimitSpecification
|
|
Tantalum target
|
1193*127*6.0mm 685.8*127*6.35mm 320*100*8mm 377.8*120.6*6.35mm 475*127*6.0mm Φ355.6*6mm Φ101*6.0mm Φ152.4*6.0mm
|
The maximum length of one planar target is 1550mm,the maximum width is 530mm,grain size can be controlled between 30 to 80μm.
|
For more enquiries for customization, please don't hesitate to contact us.
| 